1. tools based on the script
http://www.websequencediagrams.com/
UMLet 12.1
My best two recommendations right now would be: yUML and PlantUML (http://www.plantuml.com/plantuml/form)
If you need something more complex and integrated with Eclipse try TextUML
2. Examples of PlantUML
a)
(*)--> "2D calibration"
--> "3D calibration"
--> "Z calibration & Adjust belt levels"
--> "Learn"
if "3DS Optics" then
-->[true] "Check belt vibration (without wafer)"
--> "Check belt vibration (with wafer)"
else
--> "Check belt vibration (with wafer)"
endif
--> "0-90 deg Calibration (Update Z Calibration)"
--> "5-PT TTV compensation"
--> "Thickness compensation"
--> "Check repeatability"
--> (*)
b)
Host --> "Vision Appl": Start auto run mode "Vision Appl"-->"Vision System": Start OTF mode "Vision Appl" --> Host: Auto run mode enabled "Wafer" --> "Vision System": Wafer is comming "Vision System"-->"Vision Appl": Start sensor detected "Vision Appl"-->"Vision System": Start OTF trigger "Vision System"-->"Vision Appl": Trigger points are triggered "Vision Appl"-->"Vision Algorithm": Do construction & Inspection "Vision Appl"-->"Vision System": Stop OTF trigger "Vision Algorithm"-->"Vision Appl": Construction & Inspection done "Vision Appl" --> Host: Wafer inspection done Host --> "Vision Appl": Get inspection result "Vision Appl" --> Host: Send inspection result Host --> "Vision Appl": Stop auto run mode "Vision Appl"-->"Vision System": Stop auto run mode "Vision Appl" --> Host: Stop auto run mode ok